ASTM F2358-2004 蓝宝石衬底的特征测量标准指南

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【英文标准名称】:StandardGuideforMeasuringCharacteristicsofSapphireSubstrates
【原文标准名称】:蓝宝石衬底的特征测量标准指南
【标准号】:ASTMF2358-2004
【标准状态】:作废
【国别】:
【发布日期】:2004
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:F01.15
【标准类型】:(Guide)
【标准水平】:()
【中文主题词】:磨料;表面处理;测量;蓝宝石
【英文主题词】:backsideprocessing;compoundsemiconductors;flatness;form;front-to-frontdeviation(FFD);measurement;restrained;sag;sapphire;sapphiresubstrates;sori;taper;totalthicknessvariation(TTV);unrestrained
【摘要】:Themeasurementsdescribedinthisguidecansignificantlyaffectthefunctionofthesapphiresubstrate.Substrateswithexcessiveformerrorsinthefreestatemaycauseprocessingerrorsinproduction.Therestrainedstateofthesubstrateisintendedtosimulateascloselyaspossibletheformthatthesubstratewilltakeinoneofitsintendeduses.Duringprocessing,onesurfaceofthesubstrateissometimesforciblyrestrainedtoaflatstatethrougheithervacuumoradhesiontoaflatsurface.Themeasurementsintheclampedstateareintendedtomodeltheformofthefrontsurfaceofthesubstratewhenthebacksurfaceisconstrainedtothereferenceplane.Theformintheclampedstatemayhaveadirectimpactontheperformanceofthesubstrateinuse.Theusershoulddeterminewhethertheunrestrainedorrestrainedmeasurementsaremostpertinenttotheapplicationandspecifytheappropriateparametersaccordingly.Knowledgeofthesecharacteristicscanhelptheproducerandconsumerdetermineifthedimensionalcharacteristicsofaspecimensubstratesatisfygivengeometricalrequirements.Thisguideissuitableforsapphiresubstratesintheas-sliced,lapped,polished,orothercondition.RefertoSEMIM3forsubstratespecifications.Untiltheresultsofaplannedinterlaboratoryevaluationofthisguideareestablished,useofthisguideforcommercialtransactionsisnotrecommendedunlessthepartiestothetestestablishthedegreeofcorrelationthatcanbeobtained.1.1Thisguidecoversanondestructiveproceduretodeterminetheformofclean,drysapphiresubstrates.1.2Thisguideisapplicabletosubstrates25mmorlargerindiameter,withaminimumthicknessof100956;m.Thisguideisindependentofsurfacefinish.1.3Themeasurementsdescribedinthisguidemaybeappliedtotheentireglobalsurfaceofthesubstrate,ortosmallerlocalizedareas.1.4Thevalueofthemeasurementsdescribedinthisguidewillbeaffectedbytheamountofedgeexclusion(thatis,theareaaroundtheperimeterofthepartwhichisignored).Theamountexcludedshouldbeagreeduponbytheproducerandconsumerusingthisstandard.1.5Thisstandarddoesnotpurporttoaddressallofthesafetyconcerns,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatoryrequirementspriortouse.
【中国标准分类号】:J43
【国际标准分类号】:25_100_70
【页数】:7P.;A4
【正文语种】: